Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films
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DOI: 10.1088/1361-6439/ab60bf
Abstract: A piezoelectric nanoelectromechanical system (NEMS) with integrated actuation and detection capabilities was fabricated using lead zirconate titanate (PZT) thin films patterned by microcontact printing. PZT-coated cantilever resonators of various dimensions were fabricated to assess the… read more here.
Keywords: zirconate titanate; pzt; lead zirconate; microcontact printed ... See more keywords