Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor.
Sign Up to like & getrecommendations! Published in 2017 at "IFAC-PapersOnLine"
DOI: 10.1016/j.ifacol.2017.08.2455
Abstract: Abstract This article describes a method for tracking control of monolithic nanopositioning systems using integrated piezoelectric sensors. The monolithic nanopositioner is constructed from a single sheet of piezoelectric material where a set of flexures are… read more here.
Keywords: using integrated; control monolithic; piezoelectric nanopositioning; control ... See more keywords
Precision Motion Control of Piezoelectric Nanopositioning Stage With Chattering-Free Adaptive Sliding Mode Control
Sign Up to like & getrecommendations! Published in 2017 at "IEEE Transactions on Automation Science and Engineering"
DOI: 10.1109/tase.2016.2575845
Abstract: This paper presents the precision motion control of a piezoelectric nanopositioning stage using a new scheme of adaptive sliding mode control with uncertainty and disturbance estimation (ASMC-UDE). One uniqueness of the reported ASMC-UDE scheme is… read more here.
Keywords: precision motion; piezoelectric nanopositioning; motion control; control ... See more keywords