A Thin-Film Piezoelectric-on-Silicon MEMS Oscillator for Mass Sensing Applications
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2020.2979283
Abstract: In this study, a Thin-film Piezoelectric-on-Silicon (TPoS) MEMS oscillator is successfully demonstrated that uses lead zirconate titanate (PZT) thin-film piezoelectric layer deposited on a single-crystal silicon substrate to realize a length-extensional mode resonator, having a… read more here.
Keywords: thin film; film piezoelectric; piezoelectric silicon; mass ... See more keywords