Articles with "piezoelectric thin" as a keyword



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Piezoelectric Micromachined Ultrasonic Transducer Using Silk Piezoelectric Thin Film

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Published in 2018 at "IEEE Electron Device Letters"

DOI: 10.1109/led.2018.2816646

Abstract: In this letter, we present for the first time, a successful fabrication and characterization of silk piezoelectric thin film-based piezoelectric micromachined ultrasonic transducer (PMUT). One of the exacting problems in the PMUT research is to… read more here.

Keywords: piezoelectric micromachined; silk piezoelectric; thin film; piezoelectric thin ... See more keywords

Sputter Deposition and Characterization of Sm-Doped Pb(Mg1/3, Nb2/3)O₃–PbTiO₃ Epitaxial Thin Film on Si Toward Giant-Piezoelectric Thin Film for MEMS Actuator Application

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Published in 2022 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"

DOI: 10.1109/tuffc.2022.3156881

Abstract: To meet the growing demand for better piezoelectric thin films for microelectromechanical systems (MEMSs), we have developed an SM-doped Pb(Mg1/3, Nb2/3)O3–PbTiO3 (Sm-PMN-PT) epitaxial thin film as a next-generation piezoelectric thin film to replace Pb(Zr, Ti)O3… read more here.

Keywords: sub sub; epitaxial thin; piezoelectric thin; film ... See more keywords
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Integration of AlN piezoelectric thin films on ultralow fatigue TiNiCu shape memory alloys

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Published in 2020 at "Journal of Materials Research"

DOI: 10.1557/jmr.2020.106

Abstract: read more here.

Keywords: thin films; films ultralow; integration aln; aln piezoelectric ... See more keywords
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An objective bone conduction verification tool using a piezoelectric thin-film force transducer

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Published in 2022 at "Frontiers in Neuroscience"

DOI: 10.3389/fnins.2022.1068682

Abstract: All hearing aid fittings should be validated with appropriate outcome measurements, whereas there is a lack of well-designed objective verification methods for bone conduction (BC) hearing aids, compared to the real-ear measurement for air conduction… read more here.

Keywords: transducer; piezoelectric thin; force transducer; method ... See more keywords