Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station
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DOI: 10.3390/mi13030412
Abstract: In order to develop a high-resolution piezoelectric walking actuator with a long stroke for the wafer probe station, this work presents a design of a piezoelectric walking actuator with two auxiliary clamping feet elastically attached… read more here.
Keywords: piezoelectric walking; long stroke; actuator; wafer probe ... See more keywords