Damping analysis of a quad beam MEMS piezoresistive accelerometer
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DOI: 10.1080/02286203.2020.1734740
Abstract: ABSTRACT This article presents the simulation and experimental validation of damping for an MEMS (micro-electromechanical systems) piezoresistive accelerometer with an optimized mass dimension and air gap. A commercially available device should be able to withstand… read more here.
Keywords: piezoresistive accelerometer; accelerometer; air gap; electroplated gold ... See more keywords