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Published in 2020 at "Applied Physics Letters"
DOI: 10.1063/5.0004943
Abstract: This paper reports on a platform for monolithic integration of piezoelectric and piezoresistive devices on a single chip using the ScAlN/3C-SiC/Si heterostructure. Surface acoustic wave devices with an electromechanical coupling of 3.2% and an out-of-band…
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Keywords:
scaln sic;
piezoresistive devices;
piezoelectric piezoresistive;
monolithic integration ... See more keywords