An SOI-Structured Piezoresistive Differential Pressure Sensor with High Performance
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DOI: 10.3390/mi13122250
Abstract: This paper presents a piezoresistive differential pressure sensor based on a silicon-on-insulator (SOI) structure for low pressure detection from 0 to 30 kPa. In the design phase, the stress distribution on the sensing membrane surface… read more here.
Keywords: differential pressure; piezoresistive differential; pressure sensor; temperature ... See more keywords