MEMS-based Ni–B probe with enhanced mechanical properties for fine pitch testing
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DOI: 10.1186/s40486-016-0039-1
Abstract: We fabricated and characterized microelectromechanical systems (MEMS)-based Ni–B probes with enhanced mechanical properties for fine pitch testing. The Ni–B micro-probes were compared with conventional Ni–Co micro-probes in terms of the mechanical performance and thermal effect.… read more here.
Keywords: fine pitch; pitch testing; mems based; micro ... See more keywords