LAUSR

Sub-pixel Position Estimation Algorithm Based on Gaussian Fitting and Sampling Theorem Interpolation for Wafer Alignment

Sign Up to like & get
recommendations!
0 Published in 2021 at "Applied Optics"

DOI: 10.1364/ao.437440

Abstract: Wafer alignment is the core technique of lithographic tools. Image-processing-based wafer alignment techniques are commonly used in lithographic tools. An alignment algorithm is used to analyze the alignment mark image for obtaining the mark position.… read more here.

Keywords: algorithm; sub pixel; gaussian fitting; pixel position ... See more keywords