A CMOS-MEMS Pixel Sensor for Thermal Neutron Imaging
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DOI: 10.3390/mi14050952
Abstract: A monolithic pixel sensor with high spatial granularity (35 × 40 μm2) is presented, aiming at thermal neutron detection and imaging. The device is made using the CMOS SOIPIX technology, with Deep Reactive-Ion Etching post-processing… read more here.
Keywords: mems pixel; cmos mems; pixel sensor; thermal neutron ... See more keywords