Articles with "plad sidewall" as a keyword



Photo from wikipedia

Quantitative Aspects of PLAD Sidewall Doping Characterization by SIMS and APT

Sign Up to like & get
recommendations!
Published in 2019 at "Microscopy and Microanalysis"

DOI: 10.1017/s1431927618015301

Abstract: Abstract Application of atom probe tomography (APT) and 1.5D secondary ion mass spectrometry (SIMS) as complimentary techniques to study fin sidewall doping by plasma implantation (PLAD) is the focus of this paper. Unlike planar transistors,… read more here.

Keywords: characterization; sidewall doping; sims apt; quantitative aspects ... See more keywords