Fabrication of infrared linear arrays of InAs planar avalanche photodiodes.
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DOI: 10.1364/oe.460017
Abstract: We report a, to the best of our knowledge, new device fabrication process for 128-pixel linear arrays of InAs planar avalanche photodiodes, utilizing selective area implantation of Beryllium ions into epitaxially-grown InAs wafers. The pixels… read more here.
Keywords: linear arrays; avalanche photodiodes; arrays inas; planar avalanche ... See more keywords