Finding the optimum design of the planar cutoff probe through a computational study
Sign Up to like & getrecommendations! Published in 2021 at "AIP Advances"
DOI: 10.1063/5.0033222
Abstract: A new plasma diagnostic tool called the planar cutoff probe (PCP), recently developed by Kim et al. [Plasma Sources Sci. Technol. 28, 015004(2019)], can be embedded into a chamber wall or wafer chuck electrode for… read more here.
Keywords: cutoff probe; planar cutoff; design; probe ... See more keywords