Front and back surface measurement of the transparent planar element based on multi-frequency fringe deflectometry.
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DOI: 10.1364/oe.470304
Abstract: As a highly accurate metrology, phase measuring deflectometry (PMD) can be used for in-situ surface shape measurement. However, due to the reflection off the back surface, PMD cannot measure both the front and back surfaces… read more here.
Keywords: planar element; transparent planar; deflectometry; front back ... See more keywords