A High-Consistency Broadband MEMS-Based Electrochemical Seismometer With Integrated Planar Microelectrodes
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DOI: 10.1109/ted.2017.2728101
Abstract: This paper presents a broadband micro-electromechanical systems-based electrochemical seismometer with a new sensing unit composed of planar microelectrodes and perpendicular flow channels. The proposed sensing unit only needs three main microfabrication steps, leading to high… read more here.
Keywords: planar microelectrodes; high consistency; based electrochemical; electrochemical seismometer ... See more keywords