Planar Microsupercapacitors Based on Oblique Angle Deposited Highly Porous TiN Thin Films.
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DOI: 10.1021/acsami.2c03213
Abstract: Microsupercapacitors are gaining increasing interest for energy storage in miniaturized electronic devices. However, the production of porous electrode material with standard microfabrication techniques is a big problem. Here, we report on the oblique angle deposition… read more here.
Keywords: tin films; highly porous; tin thin; tin ... See more keywords