Integrated Fabrication Process of Si Microcantilever Using TMAH Solution With Planar Molybdenum Mask
Sign Up to like & getrecommendations! Published in 2023 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2023.3263530
Abstract: The anisotropic etching release of a silicon microcantilever structure becomes challenging when it has embedded metal layers. We integrated the anisotropic wet silicon etching and etch-back method for the microcantilever releasing process in a silicon-on-insulator… read more here.
Keywords: microcantilever; mask; silicon; metal ... See more keywords