Kinetic investigation of the planar multipole resonance probe in the low-pressure plasma
Sign Up to like & getrecommendations! Published in 2021 at "Plasma Sources Science and Technology"
DOI: 10.1088/1361-6595/ac27bb
Abstract: Active Plasma Resonance Spectroscopy (APRS) is a well-established plasma diagnostic method: a radio frequency signal is coupled into the plasma via a probe or antenna, excites it to oscillate, and the response is evaluated through… read more here.
Keywords: plasma; probe; model; multipole resonance ... See more keywords
The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Transactions on Microwave Theory and Techniques"
DOI: 10.1109/tmtt.2020.2974835
Abstract: In this article, a novel minimally invasive approach to plasma monitoring in the challenging environment of dielectric deposition processes based on the planar multipole resonance probe (pMRP) is presented. By placing the sensor on the… read more here.
Keywords: dielectric deposition; minimally invasive; deposition processes; planar multipole ... See more keywords