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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13071028
Abstract: We report an optofluidic hybrid silicon-polymer planar ring resonator with integrated microfluidic channels for efficient liquid delivery. The device features a planar architecture of intersecting liquid-core waveguides and microfluidic channels. A low-loss integration of microfluidic…
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Keywords:
ring resonator;
planar optofluidic;
integration;
optofluidic integration ... See more keywords