Oxidation-enhanced Si self-diffusion in isotopically modulated silicon nanopillars
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DOI: 10.1063/1.5134105
Abstract: Silicon (Si) self-diffusivity in a Si nanopillar under dry oxidation was quantitatively evaluated by atom probe tomography of Si isotope heterostructure interfaces. Dry oxidation of a nanopillar with 200 nm diameter at 920 °C for 4 h revealed… read more here.
Keywords: enhanced self; diffusion; oxidation; oxidation enhanced ... See more keywords