Uncertainty Evaluation for Measurements of Pitch Deviation and Out-of-Flatness of Planar Scale Gratings by a Fizeau Interferometer in Littrow Configuration
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DOI: 10.3390/app8122539
Abstract: Form errors of a planar scale grating, such as pitch deviations and out-of-flatness, are major contributors to the final measurement uncertainty of an interferential scanning-type planar encoder. Following the previous work, in which a method… read more here.
Keywords: fizeau interferometer; uncertainty; littrow configuration; uncertainty evaluation ... See more keywords