Wafer‐Scale CMOS‐Compatible Electro‐Thermally Actuated Nanomechanical Non‐Volatile Switch with Out‐of‐Plane Electrode Configuration
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DOI: 10.1002/aelm.202400045
Abstract: The rapid growth of data‐intensive applications has significantly heightened the concerns about power consumption in current computing systems. From this perspective, there have been substantial efforts to implement ultra‐low power systems by integrating nanoelectromechanical non‐volatile… read more here.
Keywords: cmos; non volatile; electrode configuration; plane electrode ... See more keywords