Compact differential plane interferometer with in-axis mirror tilt detection
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DOI: 10.1016/j.optlaseng.2021.106568
Abstract: Abstract Besides the environmental fluctuations, the typical sources of significant uncertainty in the laser interferometry systems are the geometrical errors. These are stemming, among others, from the misalignment of measurement axes, the thermo-mechanical influences of… read more here.
Keywords: mirror; differential plane; interferometer; plane interferometer ... See more keywords