High-temperature direct bonding of langasite using oxygen plasma activation
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DOI: 10.1016/j.scriptamat.2020.113681
Abstract: Abstract A plasma-activated direct bonding method of langasite at 1000 °C under the pressure of 6 MPa has been achieved. The optimized plasma parameter analyzed by the infrared spectroscopy is oxygen 200 W for 45 s. According to… read more here.
Keywords: oxygen plasma; plasma activation; plasma; direct bonding ... See more keywords