Articles with "plasma cleaning" as a keyword



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UWAVS first mirror plasma cleaning technology using 30–60 MHz RF discharges

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Published in 2018 at "Fusion Engineering and Design"

DOI: 10.1016/j.fusengdes.2018.04.047

Abstract: In ITER, first mirrors for the Upper Wide Angle Viewing System (UWAVS) are expected to experience contamination with beryllium and tungsten. Contamination levels of 10 nm can degrade mirror performance. In the UWAVS, a first… read more here.

Keywords: uwavs first; first mirror; cleaning technology; plasma cleaning ... See more keywords
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Plasma cleaning of steam ingressed ITER first mirrors

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Published in 2019 at "Nuclear materials and energy"

DOI: 10.1016/j.nme.2019.100702

Abstract: Abstract In ITER, the first mirrors (FMs) are vulnerable to an in-vessel coolant leak which could severely diminish their optical properties. To understand the scope of this potential impact, several FM samples were exposed to… read more here.

Keywords: first mirrors; iter first; iter; plasma cleaning ... See more keywords
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Plasma Cleaning Improves the Image Quality of Serial Block-face Scanning Electron Microscopy (SBFSEM) Volumetric Data Sets

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Published in 2017 at "Microscopy and Microanalysis"

DOI: 10.1017/s1431927617006997

Abstract: SBFSEM is an automated technique to obtain serial images in a SEM for 3D reconstruction developed by Denk and Horstman (2004) and commercialized by Gatan as the 3View® system. The large volumetric datasets so generated… read more here.

Keywords: image quality; microscopy; improves image; sbfsem ... See more keywords
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Development of the Plasma Cleaning System for the Entrance Mirror of the CXRS-edge Diagnostics of ITER on the Basis of a Discharge with a Mesh Hollow Cathode

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Published in 2021 at "Instruments and Experimental Techniques"

DOI: 10.1134/s0020441221030313

Abstract: The dependence of the sputtering efficiency for a Mo mirror mock-up on the discharge power and the pressure of the working gas (Ar) has been investigated for three options of grounding of the discharge-cell elements… read more here.

Keywords: mirror; plasma cleaning; discharge; entrance mirror ... See more keywords
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Application of plasma cleaning process in MEMS filter micro-assembly

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Published in 2020 at "Modern Physics Letters B"

DOI: 10.1142/s0217984920502565

Abstract: To solve the problems of low efficiency and high void rate in the process of the MEMS filter (die) attach and increase the strength of wire bonding between the die and microwave circuit board, plas... read more here.

Keywords: mems filter; application plasma; plasma cleaning; process mems ... See more keywords