Articles with "plasma doping" as a keyword



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Surface chemical structure and doping characteristics of boron-doped Si nanowires fabricated by plasma doping

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Published in 2017 at "Applied Surface Science"

DOI: 10.1016/j.apsusc.2017.05.015

Abstract: Abstract We investigated the conduction characteristics of plasma-doped Si nanowires (NWs) after various rapid thermal annealing (RTA) times. The plasma doping (PD) process developed a highly-deposited B layer at the NW surface. RTA process controls… read more here.

Keywords: doped nanowires; doping characteristics; process; surface chemical ... See more keywords
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Effects of NH3 Plasma and Mg Doping on InGaZnO pH Sensing Membrane

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Published in 2021 at "Membranes"

DOI: 10.3390/membranes11120994

Abstract: In this study, the effects of magnesium (Mg) doping and Ammonia (NH3) plasma on the pH sensing capabilities of InGaZnO membranes were investigated. Undoped InGaZnO and Mg-doped pH sensing membranes with NH3 plasma were examined… read more here.

Keywords: nh3 plasma; ingazno sensing; spectroscopy; effects nh3 ... See more keywords