A non-lithographic plasma nanoassembly technology for polymeric nanodot and silicon nanopillar fabrication
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DOI: 10.1007/s11705-019-1809-0
Abstract: In this work, we present plasma etching alone as a directed assembly method to both create the nanodot pattern on an etched polymeric (PMMA) film and transfer it to a silicon substrate for the fabrication… read more here.
Keywords: plasma; fabrication; plasma nanoassembly; silicon ... See more keywords