Articles with "plasma oxidation" as a keyword



Combination of Polydopamine and Plasma Oxidation to Increase Tissue Integration of Polyurethane‐Silicone Copolymers for Cardiovascular Implants

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Published in 2025 at "Advanced Healthcare Materials"

DOI: 10.1002/adhm.202500577

Abstract: Polyurethane (PU)‐silicone co‐polymers are increasingly favored in medical applications due to their excellent biostability and durability; however, their intrinsic hydrophobicity limits tissue integration. Polydopamine (PDA) deposition is a widely accepted method for increasing biomaterial surface… read more here.

Keywords: plasma oxidation; tissue integration; increase;

Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

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Published in 2024 at "Advanced Materials Interfaces"

DOI: 10.1002/admi.202400558

Abstract: Molybdenum (Mo) has a high potential of becoming the material of choice for sub‐10 nm scale metal structures in future integrated circuits (ICs). Manufacturing at this scale requires exceptional precision and consistency, so many metal… read more here.

Keywords: molybdenum interconnects; plasma oxidation; metal; digital etching ... See more keywords

Kinetics of plasma oxidation of germanium-tin (GeSn)

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Published in 2017 at "Applied Surface Science"

DOI: 10.1016/j.apsusc.2017.06.298

Abstract: Abstract The kinetics of plasma oxidation of GeSn at low temperature is investigated. The oxidation process is described by a power-law model where the oxidation rate decreases rapidly from the initial oxidation rate with increasing… read more here.

Keywords: oxidation; kinetics plasma; gesn; gesn oxide ... See more keywords

Al2O3 formed by post plasma oxidation of Al as a Gate dielectric for AlGaN/GaN MIS-HEMTs

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Published in 2019 at "Applied Surface Science"

DOI: 10.1016/j.apsusc.2019.03.065

Abstract: Abstract We demonstrate patterned Al2O3 formation by post-plasma oxidation of a thin layer of aluminium (Al) film deposited by electron beam evaporator in area selective regions. The oxide quality is observed to further improve by… read more here.

Keywords: found respectively; plasma oxidation; post plasma; plasma ... See more keywords
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High-K metal gate stacks with ultra-thin interfacial layers formed by low temperature microwave-based plasma oxidation

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Published in 2017 at "Microelectronic Engineering"

DOI: 10.1016/j.mee.2017.05.041

Abstract: Abstract Ultra-thin interfacial silicon oxide layers are grown by microwave-based plasma oxidation at temperatures below 200 °C. The influence of plasma gas composition and plasma pulsing on layer properties is tested. The oxides are compared to… read more here.

Keywords: ultra thin; high metal; microwave based; plasma oxidation ... See more keywords

Calibration Approach for Gaseous Oxidized Mercury Based on Nonthermal Plasma Oxidation of Elemental Mercury

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Published in 2022 at "Analytical Chemistry"

DOI: 10.1021/acs.analchem.2c00260

Abstract: Atmospheric mercury measurements carried out in the recent decades have been a subject of bias largely due to insufficient consideration of metrological traceability and associated measurement uncertainty, which are ultimately needed for the demonstration of… read more here.

Keywords: nonthermal plasma; calibration; plasma oxidation; hgii ... See more keywords

Mechanistic Insights into Plasma Oxidation of Ag Nanofilms: Experimental and Theoretical Studies

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Published in 2024 at "ACS Omega"

DOI: 10.1021/acsomega.4c03608

Abstract: Plasma oxidation of metals has been studied extensively to fabricate nanoporous oxides with the merits of room temperature treatment and facile control of the oxidation rate. Plasma oxidation of Ag, motivated by studies on atomic… read more here.

Keywords: mechanistic insights; oxidation nanofilms; plasma oxidation; insights plasma ... See more keywords

High-performance GaN HEMTs with GaON under-gate cap layer via barrier-friendly selective plasma oxidation

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Published in 2025 at "Applied Physics Letters"

DOI: 10.1063/5.0260480

Abstract: Schottky-gated terahertz high-electron mobility transistors with ultrathin barriers suffer from metal-induced gap states (MIGSs), leading to gate leakage and electron scattering that degrade transport properties. While oxygen plasma oxidation of the InAlN barrier can mitigate… read more here.

Keywords: barrier; gate; plasma oxidation; performance ... See more keywords

Plasma oxidation pretreatment: a novel approach for plasma-induced hydrogel activation

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Published in 2025 at "Journal of Physics D: Applied Physics"

DOI: 10.1088/1361-6463/ae08c5

Abstract: Owing to the unique three-dimensional network structure with excellent mechanical properties and ability to store reactive oxygen and nitrogen species (RONS), plasma-activated hydrogel (PAH) has great potential in the biomedical field. However, polymer materials used… read more here.

Keywords: oxidation pretreatment; plasma oxidation; oxidation; plasma ... See more keywords