Kinetics of plasma oxidation of germanium-tin (GeSn)
Sign Up to like & getrecommendations! Published in 2017 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2017.06.298
Abstract: Abstract The kinetics of plasma oxidation of GeSn at low temperature is investigated. The oxidation process is described by a power-law model where the oxidation rate decreases rapidly from the initial oxidation rate with increasing… read more here.
Keywords: oxidation; kinetics plasma; gesn; gesn oxide ... See more keywords
Al2O3 formed by post plasma oxidation of Al as a Gate dielectric for AlGaN/GaN MIS-HEMTs
Sign Up to like & getrecommendations! Published in 2019 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2019.03.065
Abstract: Abstract We demonstrate patterned Al2O3 formation by post-plasma oxidation of a thin layer of aluminium (Al) film deposited by electron beam evaporator in area selective regions. The oxide quality is observed to further improve by… read more here.
Keywords: found respectively; plasma oxidation; post plasma; plasma ... See more keywords
High-K metal gate stacks with ultra-thin interfacial layers formed by low temperature microwave-based plasma oxidation
Sign Up to like & getrecommendations! Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.05.041
Abstract: Abstract Ultra-thin interfacial silicon oxide layers are grown by microwave-based plasma oxidation at temperatures below 200 °C. The influence of plasma gas composition and plasma pulsing on layer properties is tested. The oxides are compared to… read more here.
Keywords: ultra thin; high metal; microwave based; plasma oxidation ... See more keywords
Calibration Approach for Gaseous Oxidized Mercury Based on Nonthermal Plasma Oxidation of Elemental Mercury
Sign Up to like & getrecommendations! Published in 2022 at "Analytical Chemistry"
DOI: 10.1021/acs.analchem.2c00260
Abstract: Atmospheric mercury measurements carried out in the recent decades have been a subject of bias largely due to insufficient consideration of metrological traceability and associated measurement uncertainty, which are ultimately needed for the demonstration of… read more here.
Keywords: nonthermal plasma; calibration; plasma oxidation; hgii ... See more keywords