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   Articles with "plasma parameters" as a keyword



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On the Control of Plasma Parameters and Active Species Kinetics in CF4 + O2 + Ar Gas Mixture by CF4/O2 and O2/Ar Mixing Ratios

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recommendations! Published in 2017 at "Plasma Chemistry and Plasma Processing"

DOI: 10.1007/s11090-017-9820-z

Abstract: The effects of both CF4/O2 and Ar/O2 mixing ratios in three-component CF4 + O2 + Ar mixture on plasma parameters, densities and fluxes of active species determining the dry etching kinetics were analyzed. The investigation combined plasma diagnostics by… read more here.

Keywords: plasma; cf4; gas; mixing ratios ... See more keywords

Adrenalectomy impairs vasoactive intestinal peptide-induced changes in food intake and plasma parameters

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recommendations! Published in 2019 at "Endocrine"

DOI: 10.1007/s12020-019-02012-w

Abstract: The aim of this study is to evaluate the effects of adrenalectomy (ADX) and glucocorticoid in the changes induced by intracerebroventricular (ICV) administration of vasoactive intestinal peptide (VIP) on food intake and plasma parameters, as… read more here.

Keywords: plasma; intake plasma; food intake; plasma parameters ... See more keywords

Effects of the gas puffing neutral on the plasma parameters in the end-cell of GAMMA 10/PDX by using the multi-fluid code “LINDA”

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recommendations! Published in 2019 at "Nuclear Materials and Energy"

DOI: 10.1016/j.nme.2018.12.027

Abstract: Abstract This research numerically investigates the behavior of plasma flow in GAMMA 10/PDX. The impact of impurity gases seeding into the divertor region on the plasma parameters and the energy loss processes has been investigated… read more here.

Keywords: gas; loss; gamma pdx; plasma parameters ... See more keywords

A study on plasma parameters in Ar/SF6 inductively coupled plasma

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recommendations! Published in 2017 at "Physics of Plasmas"

DOI: 10.1063/1.4974036

Abstract: Sulfur hexafluoride (SF6) gas or Ar/SF6 mixing gas is widely used in plasma processes. However, there are a little experimental studies with various external parameters such as gas pressure and mixing ratio. In this work,… read more here.

Keywords: plasma; coupled plasma; gas; study plasma ... See more keywords

Measurement of plasma parameters in He microdischarge by means of additional sensor electrode

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recommendations! Published in 2017 at "Physics of Plasmas"

DOI: 10.1063/1.4983620

Abstract: The temperature and density of electrons are measured in a high pressure dc He microdischarge plasma. An additional electrode sensor, placed at the boundary of the discharge volume, is used to measure the sensor current-voltage… read more here.

Keywords: microdischarge means; measurement plasma; electrode; plasma parameters ... See more keywords
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Truncation of a nanosecond CO2 laser pulse by following of the temporal characteristics of the plasma parameters in laser ablation model

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recommendations! Published in 2020 at "Physics of Plasmas"

DOI: 10.1063/5.0010015

Abstract: The evolution of laser-induced plasma for an aluminum target in a helium ambient gas at different pressures of 100, 300, 500, 700, and 1000 mbar is numerically studied. A thermal model of laser ablation is… read more here.

Keywords: laser; co2 laser; gas; laser ablation ... See more keywords
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Temporal evolution of plasma parameters in a pulse-modulated capacitively coupled Ar/O2 mixture discharge

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recommendations! Published in 2020 at "AIP Advances"

DOI: 10.1063/5.0019527

Abstract: The time-resolved measurements of the plasma parameters are carried out in a pulse-modulated low pressure capacitively coupled discharge operated in argon and argon–oxygen mixtures. Measurements are performed at a constant radio-frequency (RF) power of 130… read more here.

Keywords: discharge; pulse modulated; temporal evolution; plasma parameters ... See more keywords
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Basic plasma parameters and physical properties of inverted He fireballs

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recommendations! Published in 2018 at "Plasma Sources Science and Technology"

DOI: 10.1088/1361-6595/aaa332

Abstract: In this paper, we present systematic measurements of the basic plasma parameters of inverted fireballs (FBs) in a helium plasma for the first time. Inverted FBs in helium with a diameter of 10 cm are… read more here.

Keywords: inverted fireballs; plasma; parameters physical; basic plasma ... See more keywords

Evolution of two-dimensional plasma parameters in the plane of the wafer during the E- to H- and H- to E-mode transition in an inductively coupled plasma

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recommendations! Published in 2018 at "Plasma Sources Science and Technology"

DOI: 10.1088/1361-6595/aac241

Abstract: The evolution of plasma parameters during the transition from E- to H- and from H- to E-mode is measured at the wafer level two-dimensionally at low and high pressures. The plasma parameters, such as electron… read more here.

Keywords: plasma parameters; plasma; mode transition; electron ... See more keywords

Triple-frequency floating probe method for plasma parameters applicable to processing plasmas

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recommendations! Published in 2025 at "Plasma Sources Science and Technology"

DOI: 10.1088/1361-6595/add320

Abstract: Measuring plasma parameters, such as plasma density and electron temperature, is crucial for precise plasma process control, as these parameters directly influence chemical reactions and ion energy in the processing chamber, ultimately affecting the quality… read more here.

Keywords: dielectric layer; plasma; method; probe ... See more keywords

Influence of large biased surfaces on the plasma parameters in the extraction region of a negative hydrogen ion source

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recommendations! Published in 2025 at "Plasma Sources Science and Technology"

DOI: 10.1088/1361-6595/adf7d4

Abstract: The neutral beam injection system in the upcoming fusion reactor ITER will use radio-frequency (RF), low-pressure, and high-power negative hydrogen/deuterium ion plasma sources. The extraction of negative ions from the plasma is always accompanied by… read more here.

Keywords: biased surfaces; source; model; ion ... See more keywords