Sputtering process in the presence of plasma self-organization
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DOI: 10.1063/1.4973643
Abstract: Correlation between the plasma self-organization areas (also known as ionization zones or spokes) and the ground state/metastable atoms behavior during magnetron sputtering glow discharge is investigated. High-power impulse magnetron sputtering case is considered. For this… read more here.
Keywords: magnetron sputtering; plasma; sputtering process; self organization ... See more keywords