Articles with "plasma sputtering" as a keyword



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Synthesis of Intermetallic Phases in the Nb–Cd and Mo–Cd Systems by Ion-Plasma Sputtering and Atomic Layer Deposition of Metals in Vacuum

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Published in 2020 at "Inorganic Materials"

DOI: 10.1134/s0020168520010185

Abstract: Abstract — Niobium and molybdenum dicadmides (NbCd 2 and MoCd 2 ) have been synthesized using ion-plasma sputtering and codeposition of ultrafine niobium and cadmium or molybdenum and cadmium particles on unheated substrates at a… read more here.

Keywords: phases systems; ion plasma; plasma sputtering; intermetallic phases ... See more keywords
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Varying the Composition of Ferroelectric Films during Ion-Plasma Sputtering: Simulation and Experiment

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Published in 2018 at "Bulletin of the Russian Academy of Sciences: Physics"

DOI: 10.3103/s1062873818030322

Abstract: Varying the elemental composition of ferroelectric thin films of barium strontium titanate, barium zirconate titanate, and barium stannate titanate solid solutions obtained by ion-plasma sputtering of ceramic targets at different pressures of the working gas… read more here.

Keywords: plasma sputtering; composition ferroelectric; ion plasma; composition ... See more keywords