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Published in 2018 at "Journal of Applied Physics"
DOI: 10.1063/1.5017857
Abstract: Plasma properties of magnetrons have been extensively studied in the past with the focus on small, research-style magnetrons with planar disk targets. In this contribution, we report on plasma diagnostics of a linear magnetron because…
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Keywords:
studies linear;
plasma studies;
magnetron operating;
linear magnetron ... See more keywords