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Published in 2019 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2019.2934126
Abstract: This work presents an extensive study on the temperature coefficient of frequency (TCF) for thin-film lithium niobate (LiNbO3) resonators. To capture the temperature-frequency behavior for each vibration mode, a one-dimensional (1D) multi-section TCF model is…
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Keywords:
film lithium;
thin film;
tcf;
plate wave ... See more keywords