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Published in 2023 at "Materials"
DOI: 10.3390/ma16062462
Abstract: This study provides experimental evidence regarding the mechanism of gallium nitride (GaN) selective-area growth (SAG) on a polished plateau-patterned sapphire substrate (PP-PSS), on which aluminum nitride (AlN) buffer layers are deposited under the same deposition…
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Keywords:
growth;
plateau region;
selective area;
plateau patterned ... See more keywords