A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects
Sign Up to like & getrecommendations! Published in 2018 at "Micromachines"
DOI: 10.3390/mi9010039
Abstract: A device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in… read more here.
Keywords: free standing; characterization free; electrical characterization; standing micron ... See more keywords