Molecular dynamics and experimental study on comparison between static and dynamic ploughing lithography of single crystal copper
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DOI: 10.1016/j.apsusc.2018.08.204
Abstract: Abstract Dynamic ploughing lithography based on atomic force microscope (AFM) is a promising technique for fabrication of nano structures and devices. This study investigates the material removal mechanism and surface generation in dynamic ploughing of… read more here.
Keywords: ploughing lithography; single crystal; material removal; dynamic ploughing ... See more keywords