Achieving a High Thermally Conductive One Micron AlN Deposition by High Power Impulse Magnetron Sputtering plus Kick.
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DOI: 10.1021/acsami.4c00993
Abstract: High-power impulse magnetron sputtering (HiPIMS) plus kick is a physical vapor deposition method that employs bipolar microsecond-scale voltage pulsing to precisely control the ion energy during sputter deposition. HiPIMS plus kick for AlN deposition is… read more here.
Keywords: plus kick; aln deposition; deposition; power impulse ... See more keywords