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Published in 2019 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/ab257f
Abstract: Implantable medical devices (IMDs) can be powered wirelessly using acoustics with no need for a battery. In an acoustic power transfer system, which consists of a transmitter, medium, and a receiver, the power that the…
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Keywords:
power transfer;
power;
pmut;
generated power ... See more keywords
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Published in 2021 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"
DOI: 10.1109/tuffc.2021.3090043
Abstract: This article presents a piezoelectric micromachined ultrasonic transducer (pMUT) modified with a piston diaphragm term as piston diaphragm pMUT (PD-pMUT). The transmission sound pressure level (SPL) and the frequency bandwidth of the modified transducer can…
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Keywords:
piezoelectric micromachined;
pmut;
piston;
ultrasonic transducer ... See more keywords
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Published in 2023 at "Mathematical Problems in Engineering"
DOI: 10.1155/2023/8655096
Abstract: With the development of microelectromechanical technology, the piezoelectric micromechanical ultrasonic transducer (pMUT) for ultrasonic detection of gas-insulated switchgear (GIS) breakdown discharge has become possible. In this article, the ultrasonic-solid-pMUT coupling simulation model was established to…
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Keywords:
top electrode;
structure;
detection;
discharge ... See more keywords
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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13060962
Abstract: This paper presents a numerical reduced-order modeling (ROM) approach for complex multi-layered arrays of piezoelectric micromachined ultrasonic transducers (PMUTs). The numerical modeling technique adopted to generate an array of PMUTs consisting of a considerable number…
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Keywords:
arrays various;
efficient modeling;
simulation pmut;
pmut arrays ... See more keywords
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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13101597
Abstract: We proposed a PZT-film-based piezoelectric micromachined ultrasonic transducer (pMUT) with an I-shaped composite diaphragm to improve the sensitivity and resonant frequency of pMUTs with the same diaphragm area. The finite element method (FEM) simulation results…
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Keywords:
pzt film;
composite diaphragm;
shaped composite;
diaphragm ... See more keywords
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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13122260
Abstract: This paper presents a novel bimorph Piezoelectric Micromachined Ultrasonic Transducer (PMUT) fabricated with 8-inch standard CMOS-compatible processes. The bimorph structure consists of two layers of 20% scandium-doped aluminum nitride (Sc0.2Al0.8N) thin films, which are sandwiched…
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Keywords:
terminal connections;
outer ring;
scaln;
plate electrodes ... See more keywords
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Published in 2023 at "Micromachines"
DOI: 10.3390/mi14020374
Abstract: Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly developed in the last decade. With high output pressure to enable long-range detection and low power consumption (16 μW for over 1 m range detection has…
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Keywords:
micromachined ultrasonic;
pmut rangefinders;
range finding;
piezoelectric micromachined ... See more keywords