Dual-Function Multichannel Acoustofluidic Particle Manipulation Enabled by a PMUT Array
Sign Up to like & getrecommendations! Published in 2024 at "IEEE Transactions on Electron Devices"
DOI: 10.1109/ted.2024.3409509
Abstract: We have developed a technique of on-chip multisite acoustofluidic manipulation using aluminum nitride on silicon (AlN-on-Si) piezoelectric micromachined ultrasonic transducers (PMUTs). We demonstrate nine-channel acoustically driven particle enrichment on a $3\times 3$ PMUT array fabricated… read more here.
Keywords: dual function; pmut array; particle manipulation; particle ... See more keywords
Surface Condition Sensing With Broadband and Highly Directional PMUT Array
Sign Up to like & getrecommendations! Published in 2025 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"
DOI: 10.1109/tuffc.2025.3601660
Abstract: Ultrasound propagation attenuation coefficient detection is a widely used technique for distinguishing different media types. Multifrequency ultrasound detection provides comprehensive information but requires ultrasonic transducers with a broad bandwidth. This study presents a piezoelectric micromachined… read more here.
Keywords: pmut array; surface; array; highly directional ... See more keywords
AlScN Film Based Piezoelectric Micromechanical Ultrasonic Transducer for an Extended Long-Range Detection
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DOI: 10.3390/mi13111942
Abstract: Piezoelectric micromachined ultrasonic transducers (PMUTs) have been widely applied in distance sensing. However, the sensing distance of currently reported miniaturized ultrasonic sensors (e.g., PMUTs or CMUT) is still limited up to a certain range (e.g.,… read more here.
Keywords: long range; distance; pmut array; range ... See more keywords
Reconfigurable ScAlN Piezoelectric Micromachined Ultrasonic Transducer Arrays for Range Finding
Sign Up to like & getrecommendations! Published in 2025 at "Micromachines"
DOI: 10.3390/mi16020145
Abstract: Due to their compact sizes, low power consumption levels, and convenient integration capabilities, piezoelectric micromachined ultrasonic transducers (PMUTs) have gained significant attention for enabling environmental sensing functionalities. However, the frequency inconsistency of the PMUT arrays… read more here.
Keywords: scaln piezoelectric; micromachined ultrasonic; pmut array; piezoelectric micromachined ... See more keywords