Trajectory uniformity of the double-sided mechanical polishing of SiC single crystal substrate
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DOI: 10.1016/j.mssp.2019.104814
Abstract: Abstract SiC single crystal substrate has a useful range of physical, mechanical and electronic properties that makes it a promising material for semiconductor devices. To obtain the relationship between a certain abrasive on the polishing… read more here.
Keywords: polishing; single crystal; crystal substrate; mechanical polishing ... See more keywords