Influence of hydrogen dilution and doping gas on the material properties of plasma-deposited polycrystalline silicon thin films
Sign Up to like & getrecommendations! Published in 2020 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2020.138220
Abstract: Abstract We studied the effects of precursor gas composition and the addition of dopant gas, PH3, on polycrystalline silicon films deposited using plasma-enhanced chemical vapor deposition. Spectroscopic ellipsometry measurement and modeling results revealed that the… read more here.
Keywords: poly films; gas; hydrogen dilution; dopant gas ... See more keywords
Effects of Crystallinity on the Electrical Characteristics of Counter-Doped Polycrystalline Germanium Thin-Film Transistor via Continuous-Wave Laser Crystallization
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Journal of the Electron Devices Society"
DOI: 10.1109/jeds.2019.2914831
Abstract: The crystallinity of polycrystalline germanium (poly-Ge) films were demonstrated through continuous-wave laser crystallization (CLC) with Gaussian-distribution beam profile. The different grain sizes of CLC poly-Ge were observed in their three crystallization regions, which were 2… read more here.
Keywords: poly; thin film; counter doped; poly films ... See more keywords