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Published in 2017 at "Journal of The Mechanics and Physics of Solids"
DOI: 10.1016/j.jmps.2016.11.007
Abstract: Experiments have shown that the failure loads of Microelectromechanical Systems (MEMS) devices usually exhibit a considerable level of variability, which is believed to be caused by the random material strength and the geometry-induced random stress…
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Keywords:
strength;
mems structures;
poly mems;
model ... See more keywords