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Published in 2019 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2019.2904711
Abstract: This paper describes a micromolding and bonding process for liquid crystal polymer (LCP) packages for miniaturized magnetoelastic resonators. Millimeter-scale magnetoelastic resonators are known to be attractive for tagging applications. To allow deployment in high pressure…
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Keywords:
polymer packages;
crystal polymer;
liquid crystal;
package ... See more keywords