Effect of surface modification on the properties of plasma‐polymerized hexamethyldisiloxane thin films
Sign Up to like & getrecommendations! Published in 2019 at "Surface and Interface Analysis"
DOI: 10.1002/sia.6646
Abstract: Plasma‐polymerized hexamethyldisiloxane (pp‐HMDSO) thin films have been deposited in a radiofrequency (RF) remote plasma‐enhanced chemical vapor deposition (PECVD) system, on different types of substrates: silicon wafers, glass, quartz crystals, and chemiresistor structure. The as‐grown thin… read more here.
Keywords: thin films; film; surface; polymerized hexamethyldisiloxane ... See more keywords