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Published in 2018 at "Thermal Science"
DOI: 10.2298/tsci171009057a
Abstract: This paper addresses the complex component evolution and silicon dynamic deposition characteristics in the traditional Siemens reactor. A two-dimensional heat and mass transfer model coupled with a detailed chemical reaction mechanism was developed. The distributions…
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Keywords:
polysilicon deposition;
simulation polysilicon;
numerical simulation;
characteristics chemical ... See more keywords