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Published in 2019 at "Nanomaterials"
DOI: 10.3390/nano9040605
Abstract: Monolayer nano-sphere arrays attract great research interest as they can be used as templates to fabricate various nano-structures. Plasma etching, and in particular high-frequency plasma etching, is the most commonly used method to obtain non-close-packed…
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Keywords:
plasma;
monolayer;
frequency;
plasma etching ... See more keywords