Structural control in porous/compact multilayer systems grown by magnetron sputtering.
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DOI: 10.1088/1361-6528/aa8cf4
Abstract: In this work we analyze a phenomenon that takes place when growing magnetron sputtered porous/compact multilayer systems by alternating the oblique angle and the classical configuration geometries. We show that the compact layers develop numerous… read more here.
Keywords: porous compact; structural control; control porous; multilayer systems ... See more keywords