Effect of positional errors on the accuracy of multi-probe roundness measurement methods
Sign Up to like & getrecommendations! Published in 2020 at "Mechanical Systems and Signal Processing"
DOI: 10.1016/j.ymssp.2020.106883
Abstract: Abstract Multi-probe roundness measurement methods can be used to measure cross section roundness profiles and dynamic behaviour of large flexible rotors such as paper machine rolls. Other roundness measurement methods are not suitable for such… read more here.
Keywords: roundness measurement; roundness; positional errors; multi probe ... See more keywords
Analyses of pattern quality in roll-to-roll digital maskless lithography with positional errors.
Sign Up to like & getrecommendations! Published in 2021 at "Applied optics"
DOI: 10.1364/ao.416623
Abstract: In roll-to-roll digital maskless lithography (R2R DML) equipment, it is difficult to achieve high quality, owing to surface deformation that affects the pattern position. To address this issue, we simulated the patterning results of R2R… read more here.
Keywords: maskless lithography; roll roll; roll digital; digital maskless ... See more keywords