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Published in 2019 at "Microsystem Technologies"
DOI: 10.1007/s00542-019-04437-9
Abstract: Inherently, piezoelectric actuator is one of the devices equipped with the micrometer positioning capability and characterized by small size, fast response, high stiffness, and large blocking force. These advantages give piezoelectric actuator the possibility of…
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Keywords:
control;
control design;
positioning capability;
design piezoelectric ... See more keywords